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Applications of plasma processes to VLSI technology
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| Auteurs principaux : | , |
|---|---|
| Format : | Livre |
| Langue : | anglais japonais |
| Titre complet : | Applications of plasma processes to VLSI technology / edited by Takuo Sugano; translated by Hyo-gun Kim |
| Publié : |
New York :
Wiley
, c1985 |
| Description matérielle : | xiv, 394 p. |
| Œuvre : | Handōtai purazuma purosesu gijutsu. English |
| Sujets : |
| LEADER | 01369cam a2200409 4500 | ||
|---|---|---|---|
| 001 | PPN061774669 | ||
| 003 | http://www.sudoc.fr/061774669 | ||
| 005 | 20201209055900.0 | ||
| 010 | |a 0-471-86960-0 | ||
| 020 | |a US |b 853255 | ||
| 035 | |a (OCoLC)11754602 | ||
| 100 | |a 20020718d1985 u y0undy0103 ba | ||
| 101 | 1 | |a eng |a jpn | |
| 102 | |a US | ||
| 105 | |a a a 001|y | ||
| 181 | |6 z01 |c txt |2 rdacontent | ||
| 181 | 1 | |6 z01 |a i# |b xxxe## | |
| 182 | |6 z01 |c n |2 rdamedia | ||
| 182 | 1 | |6 z01 |a n | |
| 200 | 0 | |a Applications of plasma processes to VLSI technology |f edited by Takuo Sugano |g translated by Hyo-gun Kim | |
| 210 | |a New York |c Wiley |d c1985 | ||
| 215 | |a xiv, 394 p. |c ill. |d 24 cm | ||
| 300 | |a Translation of: Handōtai purazuma purosesu gijutsu | ||
| 300 | |a "A Wiley-Interscience publication." | ||
| 300 | |a Includes index | ||
| 320 | |a Bibliography: p. 369-389. | ||
| 500 | | | | | |a Handōtai purazuma purosesu gijutsu |m English |
| 606 | |3 PPN027237737 |a Métallurgie |2 rameau | ||
| 606 | |3 PPN027895823 |a Circuits intégrés à très grande échelle |2 rameau | ||
| 676 | |a 621.381/73 |v 19 | ||
| 680 | |a TK7871.85 |b .H34713 1985 | ||
| 700 | 1 | |3 PPN251007642 |a Sugano |b Takuo |f 1931- |4 651 | |
| 701 | 1 | |3 PPN25100807X |a Kim |b Hyo-gun |4 730 | |
| 801 | 3 | |a FR |b Abes |c 20201208 |g AFNOR | |
| 801 | 2 | |b CStRLIN |g AACR2 | |
| 930 | |5 441092105:155516906 |b 441092105 |j u | ||
| 998 | |a 5410 | ||